SCHEDULE
- April 2nd, Sunday: Tutorial for ASD
Time | Event | Lecturer & Title | Location |
13:30 - 13:55 | Registration | 3rd floor, Faculty Bldg | |
13:55 - 14:00 | Opening | Conference Chair | 3rd floor, Faculty Bldg |
14:00 - 14:50 | Class 1 | Prof. Greg Parsons "ASD by intrinsic surface properties" | 3rd floor, Faculty Bldg |
14:50 - 15:00 | Break | 3rd floor, Faculty Bldg | |
15:00 - 15:50 | Class 2 | Prof. Adrie Mackus "ASD by Passivation: from Self-assembled Monolayers to Small Molecule Inhibitors" | 3rd floor, Faculty Bldg |
15:50 - 16:00 | Break | 3rd floor, Faculty Bldg | |
16:00 - 16:50 | Class 3 | Prof. Sean Barry "Find 10 Differences Between These Precursors: ALD vs ASD Surface Chemistry" | 3rd floor, Faculty Bldg |
16:50 - 20:00 | Reception | 1st floor, Faculty Bldg |
- April 3rd, Monday: ASD Workshop Day 1
Time | Event | Session Topic & Moderator | Location |
09:00 - 09:05 | Opening Remark | Conference Chair | Auditorium |
09:05 - 10:10 | Session 1 | Methodology | Auditorium |
10:10 - 10:30 | Break | Lobby | |
10:30 - 12:00 | Session 2 | Theory & Calculation | Auditorium |
12:00 - 13:30 | Lunch | 1st floor, Faculty Bldg | |
13:30- 15:05 | Session 3 | Methodology | Auditorium |
15:05 - 15:25 | Break | Lobby | |
15:25 - 17:00 | Session 4 | Applications | Auditorium |
17:00 - 20:00 | Poster, Networking, Dinner | 1st floor, Faculty Bldg |
- April 4th, Tuesday: ASD Workshop Day 2
Time | Event | Session Topic & Moderator | Location |
09:00-09:05 | Opening Remark | Conference Chair | Auditorium |
09:05-10:10 | Session 5 | Analysis & Mechanism | Auditorium |
10:10-10:30 | Break | Lobby | |
10:30-12:00 | Session 6 | Inhibitors | Auditorium |
12:00-13:30 | Lunch | 1st floor, Faculty Bldg | |
13:30-15:05 | Session 7 | Methodology | Auditorium |
15:05-15:25 | Break | Lobby | |
15:25-16:35 | Session 8 | Analysis & Mechanism | Auditorium |
16:35-16:55 | Break | Lobby | |
16:55-17:30 | Panel Discussion | "Challenges for Extending ASD into 3D Structures" Prof. Greg Parsons | Auditorium |
17:30-17:40 | Closing Remark | Conference Chair | Auditorium |
- April 5th, Wednesday: Special Session, "ALD for Semiconductors"
Time | Event | Speakers | Location |
08:50-09:00 | Opening Remark | Conference Chair | Auditorium |
09:00-10:20 | Session S1 | Dr. Sang Ick Lee, VP of Technology, DNF, Korea Dr. Seiyon Kim, Fellow, SK hynix, Korea | Auditorium |
10:20-10:40 | Break | Lobby | |
10:40-12:00 | Session S2 | Dr. Zhebo Chen, Director of Global Product Management, Applied Materials, USA Prof. Anjana Devi, Ruhr-Universität Bochum, Germany | Auditorium |
12:00-13:30 | Lunch | 1st floor, Faculty Bldg | |
13:30-14:50 | Session S3 | Prof. Kuan-Neng Chen, National Yang Ming Chiao Tung University, Taiwan Prof. Hyungjun Kim, Yonsei University, Korea | Auditorium |
14:50-15:10 | Break | Lobby | |
15:10-16:30 | Session S4 | Dr. Hanjin Lim, VP of Technology, Samsung Electronics, Korea Dr. Tomonari Yamamoto, Vice President, TEL, Japan | Auditorium |
16:30-16:40 | Closing Remark | Conference Chair | Auditorium |